• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The invention relates to a wireless sensor for detecting or measuring at least one specific component present in a gaseous or liquid mixture, the gas sensor comprising at least one sensor cell (1) with a high electron mobility transistor comprising a source and a drain with a grid interposed between source and drain. Said at least one sensor cell (1) with high electron mobility transistor is associated with at least one split resonator ring (2, 2a) of at least one slot (3, 3a) respectively and connected between, on the one hand, the drain and, secondly, the gate or source of said at least one sensing cell (1), the sensor detecting a change in intensity or resonance frequency depending on the presence and / or concentration said at least one specific component in the gaseous or liquid mixture.
    公开号:FR3056751A1
    申请号:FR1658940
    申请日:2016-09-23
    公开日:2018-03-30
    发明作者:Vincent Aubry；Abdallah Ougazzaden；Jean-Paul Salvestrini；Paul Voss；Yacine Halfaya；Chris Bishop
    申请人:Centre National de la Recherche Scientifique CNRS；Peugeot Citroen Automobiles SA；Georgia Tech Lorraine；
    IPC主号:
    专利说明:

    Holder (s): PEUGEOT CITROEN AUTOMOBILES SA Public limited company, NATIONAL CENTER FOR SCIENTIFIC RESEARCH Public establishment, GEORGIA TECH LORRAINE Public establishment.
    Extension request (s)
    Agent (s): PEUGEOT CITROEN AUTOMOBILES SA Public limited company.
    154) DETECTION SENSOR WITH ELECTRONIC SENSING CELL AND RESONATOR RING (X).
    A HIGH MOBILITY TRANSISTOR
    FR 3 056 751 - A1 _ The invention relates to a wireless sensor for detecting or measuring at least one specific component present in a gas or liquid mixture, the gas sensor comprising at least one capture cell (1) with high electronic mobility transistor comprising a source and a drain with a gate interposed between source and drain. Said at least one sensor cell (1) with high electronic mobility transistor is associated with at least one split resonator ring (2, 2a) of at least one respective slot (3, 3a) and connected between, on the one hand, the drain and, on the other hand, the grid or the source of said at least one capture cell (1), the sensor detecting a change in intensity or resonant frequency as a function of the presence and / or of the concentration said at least one specific component in the gas or liquid mixture.
    DETECTION SENSOR WITH HIGH ELECTRONIC MOBILITY TRANSISTOR CELL AND RESONATOR RING (X) The invention relates to a wireless sensor for detecting or measuring a specific component present in a gaseous or liquid mixture , the wireless sensor comprising a sensor cell with a high electronic mobility transistor and at least one resonator ring.
    A high electronic mobility transistor, also known by the acronym HEMT for "High Electron Mobility Transistor" comprises a source and a drain with a gate interposed between the source and the drain. The operation of the collection cell is based on the conductance between two ohmic contacts that are the source and the drain, by the electrostatic action of a control electrode which is the grid.
    In what follows, a preferred application of the wireless sensor according to the present invention will be developed as a sensor for detecting a polluting element present in the exhaust gases discharged from an internal combustion engine by a motor vehicle exhaust line. This application is not limiting of the present invention.
    It is known that vehicle exhaust gases contain many chemical components, some of which are harmful to the health of individuals and some of which are harmful to the environment. To limit these environmental and health nuisances, regulations have been put in place in Europe, the United States and Japan for the measurement and / or detection of these chemical components.
    Regarding the nitrogen oxides which are part of these dangerous chemical components, hereinafter designated by their chemical formula NO X , the emission limits will be increasingly severe and they will probably be specific to the various nitrogen oxides including NO, NO 2 , N 2 O, etc., while currently NO X is globally regulated.
    The sensors currently used for automobile exhaust gases are the NO X sensors and the O 2 probes, also known by the name of lambda probe.
    They are based on the working principle of solid electrolytes and Nernst's law, and are based on zirconium oxide doped with Yttrium.
    These NO X sensors are not selective between the different gases and detect an overall concentration corresponding to the gases NO 2 , NO, N 2 O, NH 3 . In addition, their response time is high and these sensors are relatively expensive.
    Various other gas sensor technologies exist such as optical sensors, metal oxide sensors, acoustic sensors, gravimetric sensors, etc. But today, there are no sensitive, fast, low-cost sensors, resistant to the environment of an automobile exhaust and selective for different gaseous species such as O 2 , H 2 , NO 2 , NO, N 2 O, CO, CO 2 .
    A new generation of selective sensors between gases is therefore necessary to comply with this change in regulations. In addition, a sensor making it possible to separately determine the concentration of ammonia or NH 3 and the NO / NO 2 ratio would make it possible to improve the regulation of a selective catalytic reduction system also known by the abbreviation RCS reducing NO X by injection of NH 3 resulting from the decomposition of a reducing agent in the initial form of a mixture based on urea.
    In this context, work has been carried out on the development of gas sensors based on nitride semiconductors (III-N). Semiconductors based on lll-N materials are prohibited broadband materials which makes them useful for gas sensor applications. Their thermal stability and high breakdown voltage make them suitable for high temperature applications, which is the case for example for exhaust lines and / or internal combustion engines for motor vehicles.
    The measurement of these sensors is done wirelessly. Such measurement of exhaust gases with wireless sensors provides essential advantages. Indeed, the exhaust gas environment is very constrained at the very high temperatures encountered.
    Deleting the electrical contacts avoids the cost constraints associated with the necessary connectors. In addition, the resistance in the high temperature environment of these connectors may be the limiting factor in temperature and not the capacity of the sensor itself.
    Wireless sensors can also operate in liquid media or difficult to access and can also be used to measure liquid content. This also reduces the size of the sensors, which no longer require connectors.
    However, the wireless sensors for measuring and / or detecting a component inside a liquid or gaseous mixture can be improved, in particular with regard to the selectivity of the component to be detected, which must relate only to this component.
    A high electronic mobility transistor can be used in another field than for a sensor for measuring or detecting a component in a liquid or gaseous mixture. For example, the document WO-A-2015/188736 describes a transistor with high electronic mobility which is not part of a measurement sensor but is associated with a split resonator ring acting on the modulation of the transistor.
    So far, no proposal has been made in the state of the art to make the detection or measurement of components in a gaseous or liquid mixture more selective by such sensors.
    Consequently, the problem underlying this is for a wireless sensor for detecting and / or measuring a component contained in a gaseous or liquid or liquid mixture, the sensor comprising a collection cell with a high electronic mobility transistor, to detect and / or measure precisely this component selectively contained with respect to the other different components present in the gas or liquid mixture.
    To achieve this objective, there is provided according to the invention a wireless sensor for detecting or measuring at least one specific component present in a gas or liquid mixture, the gas sensor comprising at least one capture cell with a high electronic mobility transistor comprising a source and a drain with a gate interposed between source and drain, characterized in that said at least one sensor cell with high electronic mobility transistor is associated with at least one split resonator ring of at least a respective slot connected between, on the one hand, the drain and, on the other hand, the gate or the source of said at least one capture cell, the sensor detecting a change in intensity or resonant frequency in function the presence and / or the concentration of said at least one specific component in the gas or liquid mixture.
    The technical effect is to obtain a wireless gas or liquid sensor by integrating at least one high electronic mobility transistor associated with at least one split resonator ring, advantageously at least two split resonator rings. This split resonator ring is a type of meta-material used to take advantage of electromagnetic resonance.
    This type of resonance is used in different types of electronic devices but has never been applied for sensors comprising a transistor with high electronic mobility or a so-called Schottky diode.
    The split resonator ring acts as an LC type resonant circuit, resonating at a specific frequency which reacts as a waveguide by blocking electromagnetic transmissions at this frequency, conversely to a closed resonator ring which does not show any resonant frequency.
    Or the split resonator rings are either connected with the source and the drain of the high electronic mobility transistor to cause a variation of the resonance intensity or is connected between the source and the gate of the transistor causing a shift of the resonant frequency.
    The second configuration has a significant potential for increasing the sensitivity of the sensor because an offset of 10 MHz can be obtained and this offset can thus be measured by very simple devices.
    Advantageously, the intensity or the resonant frequency is a function of one or more of the following parameters taken individually or in combination:
    - of a dimension of said at least one slot of said at least one split resonator ring,
    - one or more dimensions of the material from which said at least one split resonator ring is made,
    - when said at least one split resonator ring has several slots, a number of slots for said at least one split resonator ring and,
    - when the sensor has at least two split resonator rings, of a number and of a disposition of the split resonator rings with respect to one another.
    Thus, by selecting one or more specific parameters, a sensor can be obtained which is selectively targeted on a component to be detected or measured with a specific intensity or frequency of resonance.
    In a preferred embodiment of the present invention, the sensor has at least two split resonator rings and said at least one high electron mobility transistor capture cell is inserted into said at least one slot of one of said at minus two split resonator rings.
    Advantageously, said at least one sensor cell with a high electronic mobility transistor is inserted into said at least one slot of the innermost split resonator ring of said at least two split resonator rings.
    In another preferred embodiment of the present invention, the sensor has at least two split resonator rings and said at least one high electron mobility transistor capture cell is inserted between said at least two split resonator rings.
    For the two preferred modes, that is to say a sensor cell with high electronic mobility transistor inserted either in a slot of a split resonator ring or between at least two split resonator rings, since the value of the capacity of the high electronic mobility transistor sensor varies depending on the presence of the component, such positioning of the high electronic mobility transistor varies the resonance frequency of the structure with split resonator rings.
    In these modes, a small variation in the capacity results in a wide frequency offset, which increases the measurement sensitivity of the sensor. These modes also have the advantage of having only the contacts with between, on the one hand, the transistor and ring structure and, on the other hand, the sensor.
    Advantageously, said at least one sensor cell with a high electronic mobility transistor is in the form of a ring concentric with said at least two split resonator rings.
    Advantageously, said at least one sensor cell with a high electronic mobility transistor is rectangular, square or in the form of a crown portion.
    Advantageously, the sensor has at least two concentric split resonator rings having a common center and said at least one slot of said at least two split resonator rings are aligned along a diameter of the outermost split resonator ring of said at least two split resonator rings, the common center of said at least two split resonator rings being interposed in alignment between said at least one slot of the two split resonator rings.
    The invention also relates to a set of at least two wireless detection or measurement sensors, each sensor detecting a respective specific component present in a gas or liquid mixture, characterized in that said at least two sensors are such as previously mentioned, each of said at least two sensors having a change in intensity or resonant frequency as a function of the presence and / or of the concentration of the respective specific component of each sensor in the gas or liquid mixture.
    It is thus carried out a detection or an indirect measurement that can withstand temperatures higher than tolerated in a current system with contacts. The fact of having no more contacts allows the same surface to increase the reaction surface of the gas sensitive zone.
    Transistor sensors with high electronic mobility can be designed to be sensitive to specific component molecules on a single electronic chip with different respective frequency agreements.
    The invention finally relates to an exhaust line of an internal combustion engine of a motor vehicle, characterized in that it comprises such a sensor or such a set of at least two wireless sensors for detection or measurement, the gas or liquid mixture being formed by exhaust gases passing through the exhaust line and said at least one specific component or said at least two specific components being respectively one or more gases contained in the exhaust gases, in particular gases whose content is regulated, for example NOx.
    The advantages of the solution proposed by the present invention are a selective detection or measurement between the different components or pollutants present in the exhaust gases of the line, an improved response time and a reduction in the cost of detection or of measure.
    Other characteristics, objects and advantages of the present invention will appear on reading the detailed description which follows and with regard to the appended drawings given by way of nonlimiting examples and in which:
    - Figure 1 is a schematic representation of a first embodiment of a sensor according to the present invention, the sensor having, on the one hand, a sensing cell comprising a transistor with high electronic mobility and, on the other hand , two concentric split resonator rings, the high electronic mobility transistor being inserted into the slot of the innermost ring of the two split resonator rings,
    - Figure 2 is a schematic representation of a second embodiment of a sensor according to the present invention, the sensor having, on the one hand, a pickup cell comprising a transistor with high electronic mobility and, on the other hand , two concentric split resonator rings, the high electronic mobility transistor being in the form of a ring inserted between the two concentric split resonator rings,
    - Figure 3 is a schematic representation of three curves giving transmission values as a function of frequencies for a transistor with high electronic mobility, the transistor being associated with a split resonator ring in two different shapes for two curves and with two split resonator rings for the third curve.
    It should be borne in mind that the figures are given by way of examples and are not limitative of the invention. They constitute schematic representations of principle intended to facilitate the understanding of the invention and are not necessarily at the scale of practical applications. In particular, the dimensions of the various elements illustrated are not representative of reality.
    In what follows, reference is made to all the figures taken in combination. When reference is made to one or more specific figures, these figures are to be taken in combination with the other figures for the recognition of the designated numerical references.
    Referring to all the figures, the present invention relates to a wireless sensor for detecting or measuring at least one specific component present in a gas or liquid mixture. The gas sensor comprises at least one capture cell 1, 1a with a high electronic mobility transistor comprising a source and a drain with a gate interposed between the source and the drain.
    A high electronic mobility transistor carries the drain and the source at two opposite lateral ends. In one embodiment, between the source and the drain extend a semiconductor layer III-N and a nanostructured layer of Al 0, 3 Ga 0, 7 N or active layer of electrostatic interaction, the semiconductor layer being superimposed on the layer of Al 0, 3 Ga 0, 7 N.
    The nanostructured lll-N semiconductor layer supports one or more layers forming an entry gate for the ions of the component or components to be detected or measured, for example negative oxygen ions O 2 dissociated for nitrogen oxides NOx or oxygen 02 by creating a potential difference. This layer or these layers forming an entrance door, advantageously coated with a layer of oxides, can be made of platinum or tungsten.
    [0045] Under the layer of Al 0, 3 Ga 0, N 7 extends a gate connecting the source and the drain, the gate being itself superimposed on a GaN layer, as an insulating substrate.
    According to the invention, said at least one sensor cell 1, 1a with high electronic mobility transistor is associated with at least one split resonator ring 2, 2a of at least one respective slot 3, 3a and connected between, d on the one hand, the drain and, on the other hand, the grid or the source of said at least one collection cell 1,1a.
    The sensor detects a change in intensity or resonant frequency depending on the presence and / or the concentration of said at least one specific component in the gas or liquid mixture.
    A split resonator ring 2, 2a is an artificially produced structure for meta-materials. Such a split resonator ring 2, 2a delivers a magnetic response or magnetic susceptibility creating a strong magnetic coupling necessary for an electromagnetic application and which was not previously available for conventional materials.
    A split resonator ring 2, 2a can be taken individually or be part of a structure of several split resonator rings 2, 2a. Such a structure then includes loops formed by each of the rings with splits or slots 3,
    3a in the loops. The ring or rings 2, 2a are made of non-magnetic metal, such as for example copper, and in the case of a structure with several rings while keeping a spacing between two adjacent rings. The ring or rings 2, 2a can be in the form of a crown or in a square or rectangular shape.
    A magnetic flux penetrating into the ring or the split resonator rings
    2, 2a will induce a rotation of the currents in the rings, which produce their own flux to add or oppose the incident field. The split ring or resonator rings 2, 2a can be etched on a dielectric substrate.
    The sensor may include one or more capture cells. Each sensor cell 1, 1a can comprise one or more transistors with high electronic mobility associated with one or more split resonator rings 2, 2a. Each resonator ring can be split once or multiple times.
    There are a variety of split resonator rings 2, 2a with, in the case of a structure with several rings, periodic structures. The rings 2, 2a can be nested with one another, concentric or surrounding each other without being concentric. The ring or rings 2, 2a can be in the form of a respective simple split ring in the form of a spiral or helical shape.
    Advantageously, the intensity or the resonant frequency is a function of one or more of the following parameters taken individually or in combination:
    - of a dimension of said at least one slot 3, 3a of said at least one split resonator ring 2, 2a,
    - one or more dimensions of the material of which said at least one split resonator ring 2, 2a,
    - when said at least one split resonator ring 2, 2a has several slots
    3, 3a, of a number of slots 3, 3a for said at least one split resonator ring 2, 2a and,
    - when the sensor has at least two split resonator rings 2, 2a, of a number and of an arrangement of the split resonator rings 2, 2a relative to one another.
    Without being limiting, for a structure of at least two split resonator rings 2, 2a, the arrangement may relate to the arrangement of the split resonator rings 2, 2a relative to one another, the arrangement of the slots 3, 3a of the split resonator rings 2, 2a relative to each other and / or the distance between the two split resonator rings 2, 2a.
    In a first embodiment of the structure of split resonator rings 2, 2a, this first form being illustrated in Figure 1, the sensor may have at least two split resonator rings 2, 2a and said at least one cell pick-up 1 with a high electronic mobility transistor is inserted into said at least one slot 3 of one of said at least two split resonator rings 2.
    In this first embodiment, said at least one sensor cell 1 with high electronic mobility transistor can be inserted into said at least one slot 3 of the split inner resonator ring 2 of the innermost of said at least two resonator rings split 2, 2a.
    In a second embodiment of the structure of split resonator rings 2, 2a, this second form being illustrated in Figure 2, the sensor may have at least two split resonator rings 2, 2a and said at least one cell sensor 1a with a high electronic mobility transistor can be inserted between said at least two split resonator rings 2, 2a.
    In this embodiment, said at least one sensor cell 1a with a high electronic mobility transistor can be in the form of a ring concentric with said at least two split resonator rings 2, 2a. The width of the crown formed by the pick-up cell 1, 1a can influence the intensity or the resonance frequency of the sensor. The crown can be continuous or discontinuous.
    For all embodiments, without this being limiting, said at least one sensor cell 1, 1a with a transistor with high electronic mobility can be rectangular, square or in the portion of a crown.
    The sensor may have at least two split resonator rings 2, 2a concentric with a common center and said at least one slot 3, 3a of said at least two split resonator rings 2, 2a are aligned along a diameter of the ring split outermost resonator 2a of said at least two split resonator rings 2, 2a.
    The common center of said at least two split resonator rings 2, 2a may be interposed in alignment between said at least one slot 3, 3a of the two split resonator rings 2, 2a.
    According to the two embodiments concerning the placement of the sensor relative to the two split resonator rings 2, 2a, since the value of the capacitance of the transistor sensor with high electronic mobility varies according to the quantity of the component to be detected or measure, the transistor can therefore be placed either in the opening of a ring or between the rings by varying the resonance frequency of the structure formed by the two split resonator rings 2, 2a.
    In this design, a small variation in capacitance results in a large frequency offset, which increases the measurement sensitivity of the sensor. It also has the advantage of requiring contacts only between the structure and the sensor.
    The invention also relates to a set of at least two wireless detection or measurement sensors, each sensor detecting a respective specific component present in a gas or liquid mixture.
    According to the invention, said at least two sensors are as previously mentioned, each of said at least two sensors having a change in intensity or resonant frequency depending on the presence and / or the concentration of the specific component each sensor in the gas or liquid mixture. This assembly can therefore specifically detect at least two components present in the gas or liquid mixture.
    The invention finally relates to an exhaust line of an internal combustion engine of a motor vehicle. The exhaust system includes such a sensor, in which case a component is specifically detected or measured. As an alternative, the line includes such a set of at least two wireless detection or measurement sensors, in which case two different components are simultaneously specifically detected and measured without interference between them.
    For such an exhaust line, the gas or liquid mixture mentioned above is formed by exhaust gases passing through the exhaust line and said at least one specific component or said at least two specific components being respectively one or pollutants contained in the exhaust gases, for example a nitrogen oxide of the NO or NO2 type which can then be individually detected or measured without interference with them with the other nitrogen oxides NOx or with ammonia NH3, which distorted the detections previously established according to the state of the art.
    Figure 3 shows three selective reaction curves of three sensors of different configuration. On the ordinate, a transmission power Trans is followed in decibels or dB and on the abscissa a frequency range F in gigahertz or GHz. The resonance response of the three compared sensors DAFR, AFR2.2pF and AFR4.7pF is specific to each sensor with more or less strong Trans transmission powers.
    The curve with DAFR squares illustrates a sensor with two split resonator rings 2, 2a while the other two curves relate to sensors with a simple split resonator ring 2, 2a.
    The invention is in no way limited to the embodiments described and illustrated which have been given only by way of examples.
    权利要求:
    Claims (10)
    [1" id="c-fr-0001]
    1. Wireless sensor for detecting or measuring at least one specific component present in a gaseous or liquid mixture, the gas sensor comprising at least one capture cell (1, 1a) with high electronic mobility transistor comprising a source and a drain with a grid interposed between source and drain, characterized in that said at least one capture cell (1, 1a) with high electronic mobility transistor is associated with at least one split resonator ring (2, 2a) of at least one respective slit (3, 3a) connected between, on the one hand, the drain and, on the other hand, the grid or the source of said at least one capture cell (1, 1a), the sensor detecting a change in intensity or frequency of resonance as a function of the presence and / or the concentration of said at least one specific component in the gas or liquid mixture.
    [2" id="c-fr-0002]
    2. The sensor as claimed in claim 1, in which the intensity or the resonant frequency is a function of one or more of the following parameters taken individually or in combination:
    - of a dimension of said at least one slot (3, 3a) of said at least one split resonator ring (2, 2a),
    - one or dimensions of the material of which said at least one split resonator ring (2, 2a),
    - when said at least one split resonator ring (2, 2a) has several slots (3, 3a), of a number of slots (3, 3a) for said at least one split resonator ring (2, 2a) and,
    - when the sensor has at least two split resonator rings (2, 2a), of a number and of a disposition of the split resonator rings (2, 2a) relative to one another.
    [3" id="c-fr-0003]
    3. The sensor of claim 1 or 2, wherein the sensor has at least two split resonator rings (2, 2a) and said at least one sensor cell (1) with high electronic mobility transistor is inserted in said at least one slot (3) of one of said at least two split resonator rings (2).
    [4" id="c-fr-0004]
    4. The sensor of claim 3, wherein said at least one sensor cell (1) with high electronic mobility transistor is inserted into said at least one slot (3) of the innermost split resonator ring (2) of said at least two split resonator rings (2, 2a).
    [5" id="c-fr-0005]
    5. The sensor of claim 1 or 2, wherein the sensor has at least two split resonator rings (2, 2a) and said at least one sensor cell (1) with high electronic mobility transistor is inserted between said at least two split resonator rings (2, 2a).
    [6" id="c-fr-0006]
    6. The sensor of claim 5, wherein said at least one sensor cell (1a) with high electronic mobility transistor is in the form of a ring concentric with said at least two split resonator rings (2, 2a).
    [7" id="c-fr-0007]
    7. Sensor according to any one of the preceding claims, wherein said at least one sensor cell (1, 1a) with high electronic mobility transistor is rectangular, square or in crown portion.
    [8" id="c-fr-0008]
    8. Sensor according to any one of the preceding claims, in which the sensor has at least two split resonator rings (2, 2a) concentric with a common center and said at least one slot (3, 3a) of said at least two rings split resonators (2, 2a) are aligned along a diameter of the outermost split resonator ring (2a) of said at least two split resonator rings (2, 2a), the common center of said at least two split resonator rings (2, 2a) being interposed in alignment between said at least one slot (3, 3a) of the two split resonator rings (2, 2a).
    [9" id="c-fr-0009]
    9. Set of at least two wireless detection or measurement sensors, each sensor detecting a respective specific component present in a gas or liquid mixture, characterized in that said at least two sensors are according to any one of the preceding claims , each of said at least two sensors having a change in intensity or resonant frequency as a function of the presence and / or of the concentration of the respective specific component of each sensor in the gas or liquid mixture.
    [10" id="c-fr-0010]
    10. Exhaust line of an internal combustion engine of a motor vehicle, characterized in that it comprises a sensor according to any one of claims 1 to 8 or a set of at least two wireless detection sensors or measuring device according to claim 9, the gas or liquid mixture being formed by
    5 exhaust gases crossing the exhaust line and said at least one specific component or said at least two specific components respectively being one or more gases contained in the exhaust gases, in particular NOx.
    1/3
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    同族专利:
    公开号 | 公开日
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    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    CN104614403A|2015-01-22|2015-05-13|江西师范大学|Sensor, forming method of sensor, and method for defecting gas|WO2019076437A1|2017-10-16|2019-04-25|Centre National De La Recherche Scientifique|Detection sensor with capturing cell having a high-electron-mobility transistorand ring resonators|
    WO2020188388A1|2019-03-21|2020-09-24|Epitronic Holdings Pte. Ltd.|Method for chemical and biomolecular sensing using pc-hemt comprising vivaldi antenna electrode|
    WO2020188389A1|2019-03-21|2020-09-24|Epitronic Holdings Pte. Ltd|Microelectronic sensor comprising a pc-hemt with a metamaterial electrode|
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    2018-03-30| PLSC| Publication of the preliminary search report|Effective date: 20180330 |
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    2021-11-19| TQ| Partial transmission of property|Owner name: UNIVERSITE DE LORRAINE, FR Effective date: 20211015 Owner name: GEORGIA TECH LORRAINE, FR Effective date: 20211015 Owner name: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, FR Effective date: 20211015 Owner name: PEUGEOT CITROEN AUTOMOBILES SA, FR Effective date: 20211015 |
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    申请号 | 申请日 | 专利标题
    FR1658940A|FR3056751B1|2016-09-23|2016-09-23|DETECTION SENSOR WITH HIGH ELECTRONIC MOBILITY TRANSISTOR CAPTURING CELL AND RESONATORRING |FR1658940A| FR3056751B1|2016-09-23|2016-09-23|DETECTION SENSOR WITH HIGH ELECTRONIC MOBILITY TRANSISTOR CAPTURING CELL AND RESONATORRING |
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